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New Materials For Laser Repair Of Active Matrix Liqiuid crystal Displays

Published online by Cambridge University Press:  15 February 2011

Paul B. Comita  and
Carl E. Larson
Paul B. Comita
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099
Carl E. Larson
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099
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Abstract

New materials have been developed for the repair of electrical open defects in AMLICD panel circuitry The metal-containing precursors are volatile, easily pyrolyzed to high purity conducting metal, and are decomposed at temperatures which will not damage the glass substrate or thin film circuitry. New materials have been developed for additive metal repair as well as additive passivation repair. The repair or data line metallurgy on prototype arrays has been achieved, resulting in electrical resistances of the repaired interconnects which were comparable to those of unrepaired interconnects of identical geometry.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 345: Symposium M – Flat Panel Display Materials , 1994 , 185
Copyright
Copyright © Materials Research Society 1994

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