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Near-Edge X-ray Absorption Fine Structure of Hard Carbon Film Formed by Gas Cluster Ion Beam Assisted Deposition

Published online by Cambridge University Press:  21 March 2011

Kazuhiro Kanda ,
Yutaka Shimizugawa ,
Yuichi Haruyama ,
Isao Yamada ,
Shinji Matsui ,
Teruyuki Kitagawa ,
Mititaka Terasawa ,
Harushige Tsubakino ,
Tatsuo Gejo  and
Masao Kamada
Kazuhiro Kanda
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan.
Yutaka Shimizugawa
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan.
Yuichi Haruyama
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan.
Isao Yamada
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan. Collaborative Research Center for Cluster Ion Beam Process Technology, Kyoto University, Sakyo, Kyoto 606-8501, Japan.
Shinji Matsui
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan.
Teruyuki Kitagawa
Affiliation:
Himeji Institute for Technology, Faculty of Engineering, Himeji, Hyogo 671-2201, Japan.
Mititaka Terasawa
Affiliation:
Himeji Institute for Technology, Faculty of Engineering, Himeji, Hyogo 671-2201, Japan.
Harushige Tsubakino
Affiliation:
Himeji Institute for Technology, Faculty of Engineering, Himeji, Hyogo 671-2201, Japan.
Tatsuo Gejo
Affiliation:
Institute for Molecular Science, Okazaki, Aichi 444-8585, Japan.
Masao Kamada
Affiliation:
Institute for Molecular Science, Okazaki, Aichi 444-8585, Japan.
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Abstract

The coordination of the carbon atoms in the diamond-like carbon (DLC) films formed by Ar gas cluster ion beam (GCIB) assisted deposition of fullerene was investigated using synchrotron radiation. Near-edge x-ray absorption fine structure (NEXAFS) spectra of the carbon K-edge of the DLC films formed by various methods were measured over the excitation energy range 275-320 eV, using synchrotron radiation. On the basis of the analysis of the peak corresponding the transition of the excitation electron from carbon 1s orbital to Φ orbital, relative sp2 contents of various DLC films were determined. The DLC films formed by Ar GCIB assisted fullerene deposition were found to consist of a high sp3 hybridized carbon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L3.25.1
Copyright
Copyright © Materials Research Society 2002

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References

REFERENCES

1. Ullmann, J., Nucl. Instr. and Meth. in Phys. Res. B127, 910 (1997).Google Scholar
2. Tsai, H. and Bogy, D.B., J. Vac. Sci. Technol. A5, 3287 (1987).Google Scholar
3. Yamada, I., Kitagawa, T., Matsuo, J. and Kirkpatrick, A., Mass. Char. Trans. Inorg. Materials 957 (2000).Google Scholar
4.A. HirayNakamura, a. E., Hasumoto, M., Kinoshita, T., Sakai, K., Ishiguro, E. and Watanabe, M., Rev. Sci. Instrum. 66, 2104 (1995).Google Scholar
5. Batson, P. E., Phys. Rev. B48, 2608 (1993).Google Scholar
6. Jaouen, M., Tourillon, G., Delafond, J., Junqua, N. and Hug, G., Diamond Relat. Mater. 4, 200 (1995).Google Scholar
7. Lenardi, C., Piseri, P., Briois, V., Bottani, C.E., Bassi, A. Li and Milani, P., J. Appl. Phys. 85, 7159 (1999).Google Scholar
8. Morar, J. F., Himpsel, F. J., Hollinger, G., Hughes, G. and Lordan, J. L., Phys. Rev. Lett. 54, 1960 (1985).Google Scholar
9. Berger, S. D., Kenzie, D. R. Mc and Martin, P. J., Philos. Mag. Lett. 57, 285 (1988).Google Scholar
10. Fallon, P. J., Veerasamy, V. S., Davis, C. A., Robertson, J., Amaratunga, G. A. J., Milne, W. J. and Koskinen, J., Phys. Rev. B48, 4777 (1993).Google Scholar