Hostname: page-component-848d4c4894-jbqgn Total loading time: 0 Render date: 2024-06-25T21:38:56.125Z Has data issue: false hasContentIssue false
  • English
  • Français

Nanostructure Fabrication Using Pulsed Lasers and Near-field Optical Properties of Sub-micron Particles

Published online by Cambridge University Press:  21 March 2011

L. Zhang ,
Y. F. Lu ,
W. D. Song ,
Y. W. Zheng  and
B. S. Luk'yanchuk
L. Zhang
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical and Computer Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
Y. F. Lu
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical and Computer Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
W. D. Song
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical and Computer Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
Y. W. Zheng
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical and Computer Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
B. S. Luk'yanchuk
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical and Computer Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
Get access

Abstract

Recently, the field of nanoelectonics has evolved into a major area of investigation. In this paper, we present a novel method of nanofabrication using pulsed lasers and near-field optical properties of sub-micron particles. For this purpose, spherical silica particles were deposited on a silicon surface. After laser illumination, hillocks with size of about 150 nm were obtained at the original position of the particles. The mechanism can be explained as the enhancement of light intensity near the contact area. Since the characteristic distance between particles and substrate is smaller than the radiation wavelength and the particle size is of the order of a wavelength, particle does not simply play the role of microfocusing lens as in far-field, but possess optical resonance effect in near-field. In our work, the light intensity on the surface under the spherical particle was calculated by solving the electromagnetic boundary problem “particle on suface”.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 676: Symposium Y – Synthesis, Functional Properties and Applications of Nanostructures , 2001 , Y4.3
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Jersch, J. and Dickmann, K., Appl. Phys. Lett. 68, 6 (1994).Google Scholar
2. Madsen, S., Mülleborn, M., Birkelund, K., and Grey, F., Appl. Phys. Lett. 69, 544 (1996).Google Scholar
3. Lu, Y. F., Mai, Z. H., Zheng, Y. W., and Song, W. D., Appl. Phys. Lett. 76, 1200 (2000).Google Scholar
4. Gorbunov, A. A., and pompe, W., Phys. Stat. Sol. A, 145, 333 (1994).Google Scholar
5. Luk'yanchuk, B. S., Zheng, Y. W., and Lu, Y. F., Proc. SPIE, 4065 (2000).Google Scholar
6. Bobbert, P. A. and Vlieger, J., Physica A, 137, 209 (1986).Google Scholar
7. Bobbert, P. A., Vlieger, J., and Greef, R., Physica A, 137, 243 (1986).Google Scholar
8. Lu, Y. F., Zheng, Y. W., and Song, W. D., J. Appl. Phys. 87, 2404 (2000).Google Scholar
9. Kerker, M., The Scattering of Light (Academic Press, New York & London, 1969).Google Scholar
10. Münzer, H. J., Mosbacher, M., Bertsch, M., Zimmermann, J., Leiderer, P., and Boneberg, J., Journal of Microscopy (2000).Google Scholar