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Morphology of Vapor Evaporated Mo Thin Films

Published online by Cambridge University Press:  16 February 2011

Y. Cheng  and
M. B. Stearns
Y. Cheng
Affiliation:
Department of Physics, Arizona State University, Tempe, AZ 85287
M. B. Stearns
Affiliation:
Department of Physics, Arizona State University, Tempe, AZ 85287
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Abstract

Studies were made of the dependence of the morphology of Mo films, prepared by ebeam evaporation in an UHV system, on the substrate temperature and deposition angle. The main characterization techniques used were large angle x-ray scattering and cross-sectional high resolution electron microscopy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 222: Symposium D – Atomic Layer Growth and Processing , 1991 , 351
Copyright
Copyright © Materials Research Society 1991

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References

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