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Morphological Transitions in Fluorinated and Non-Fluorinated Parylenes

Published online by Cambridge University Press:  10 February 2011

Michael Morgen ,
Jie-Hua Zhao ,
Seung-Hyun Rhee ,
E. Todd Ryant ,
Huei-Min Ho ,
Mary Anne Plano  and
Paul S. Ho
Michael Morgen
Affiliation:
Institute for Materials Science, University of Texas, Austin, TX 78712
Jie-Hua Zhao
Affiliation:
Institute for Materials Science, University of Texas, Austin, TX 78712
Seung-Hyun Rhee
Affiliation:
Institute for Materials Science, University of Texas, Austin, TX 78712
E. Todd Ryant
Affiliation:
On assignment from AMD to SEMATECH, 2706 Montopolis Drive, Austin, TX 78741
Huei-Min Ho
Affiliation:
On assignment from Intel to SEMATECH, 2706 Montopolis Drive, Austin, TX 78741
Mary Anne Plano
Affiliation:
Novellus Systems, San Jose, CA 95134
Paul S. Ho
Affiliation:
Institute for Materials Science, University of Texas, Austin, TX 78712
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Abstract

A study of temperature-induced crystallinity changes in fluorinated and nonfluorinated parylene thin films using differential scanning calorimetry, thermal stress and wide angle x-ray diffraction measurements is presented. The nonfluorinated parylene (ppx-N) is shown to undergo two phase transitions between 200°C and 300°C. Both transitions show at least some degree of reversibility. The high temperature (β1 -β2) transition is accompanied by a sudden shift in stress, which is attributed to a contraction of the polymers chains. A single, reversible phase transition, occurring between 360°C and 400°C, is observed for fluorinated parylene (ppx-F). This transition is likewise marked by a significant shift in stress, and is apparently due to a similar chain contraction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 565: Symposium O – Low-Dielectric Constant Materials V , 1999 , 297
Copyright
Copyright © Materials Research Society 1999

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