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Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica

Published online by Cambridge University Press:  01 February 2011

Yves Bellouard ,
Ali Said ,
Mark Dugan  and
Philippe Bado
Yves Bellouard
Affiliation:
Center for Automation Technologies, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY 12180–3590, U.S.A.
Ali Said
Affiliation:
Translume Inc., 755 Phoenix Drive, Ann Arbor, MI 48108–2222, U.S.A.
Mark Dugan
Affiliation:
Translume Inc., 755 Phoenix Drive, Ann Arbor, MI 48108–2222, U.S.A.
Philippe Bado
Affiliation:
Translume Inc., 755 Phoenix Drive, Ann Arbor, MI 48108–2222, U.S.A.
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Abstract

This paper presents dramatic improvements in the micro-fabrication of three-dimensional microfluidic channels and high-aspect ratio tunnels within the bulk of a fused silica substrate. We also report the fabrication of optical waveguides within the same substrate, which is a major step towards the integration of sensing capabilities within microfluidic networks.

This integrated device, which combines both fluidic channels and optical waveguides, opens new opportunities in bio- and chemical sensing. The flexibility of the improved manufacturing process offers substantial new design capabilities, especially for single channel probing and massively parallel processing and sensing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 782: Symposium A – Micro- and Nanosystems , 2003 , A3.2
Copyright
Copyright © Materials Research Society 2004

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References

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