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Microwave Assisted Chemical Vapor Infiltration

Published online by Cambridge University Press:  15 February 2011

D. J. Devlin ,
R. P. Currier ,
R. S. Barbero ,
B. F. Espinoza  and
N. Elliott
D. J. Devlin
Affiliation:
Materials Science and Technology Division Los Alamos National Laboratory Los Alamos, NM 87545
R. P. Currier
Affiliation:
Materials Science and Technology Division Los Alamos National Laboratory Los Alamos, NM 87545
R. S. Barbero
Affiliation:
Materials Science and Technology Division Los Alamos National Laboratory Los Alamos, NM 87545
B. F. Espinoza
Affiliation:
Materials Science and Technology Division Los Alamos National Laboratory Los Alamos, NM 87545
N. Elliott
Affiliation:
Materials Science and Technology Division Los Alamos National Laboratory Los Alamos, NM 87545
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Abstract

A microwave assisted process for production of continuous fiber reinforced ceramic matrix composites is described. A simple apparatus combining a chemical vapor infiltration reactor with a conventional 700 W multimode oven is described. Microwave induced inverted thermal gradients are exploited with the ultimate goal of reducing processing times on complex shapes. Thermal gradients in stacks of SiC (Nicalon) cloths have been measured using optical thermometry. Initial results on the “inside out” deposition of SiC via decomposition of methyltrichlorosilane in hydrogen are presented. Several key processing issues are identified and discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 250: Symposium R – Chemical Vapor Deposition of Refractory Metals and Ceramics II , 1991 , 245
Copyright
Copyright © Materials Research Society 1992

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References

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