Hostname: page-component-76fb5796d-vvkck Total loading time: 0 Render date: 2024-04-26T12:15:47.036Z Has data issue: false hasContentIssue false

Microstructural Effects on the Hardness, Elastic Modulus and Fracture Toughness of CVD Diamond

Published online by Cambridge University Press:  10 February 2011

A. Kant
Affiliation:
Materials Sciences Division, Lawrence Berkeley National Laboratory and Department of Materials Sciences Mineral Engineering, University of California, Berkeley, CA 94720
M. D. Drory
Affiliation:
Materials Sciences Division, Lawrence Berkeley National Laboratory and Department of Materials Sciences Mineral Engineering, University of California, Berkeley, CA 94720
N. R. Moody
Affiliation:
Sandia National Laborataries, Livermore, CA 94551
W. J. MoberlyChan
Affiliation:
Materials Sciences Division, Lawrence Berkeley National Laboratory and Department of Materials Sciences Mineral Engineering, University of California, Berkeley, CA 94720
J. W. Ager
Affiliation:
Materials Sciences Division, Lawrence Berkeley National Laboratory and Department of Materials Sciences Mineral Engineering, University of California, Berkeley, CA 94720
R. O. Ritchie
Affiliation:
Materials Sciences Division, Lawrence Berkeley National Laboratory and Department of Materials Sciences Mineral Engineering, University of California, Berkeley, CA 94720
Get access

Abstract

The hardness, elastic modulus, and fracture toughness of chemical vapor deposited (CVD) polycrystalline diamond have been investigated on several thick (∼100 μm) free-standing films with regard to the grain size, impurity content and failure mechanisms. Micro-hardness measurements using Vickers indentation, in conjunction with Young's modulus measurement techniques such as nano-indentation, were employed to estimate the indentation fracture toughness. The toughness of CVD diamond was increased through the addition of non-diamond carbon, which promoted intergranular fracture and enhanced the toughness by grain bridging.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Drory, M.D., Gardinier, C.F., and Speck, J.S., J. Am. Ceram. Soc. 74, 3148 (1991).Google Scholar
2.Novikov, N.V. and Dub, S.N., Diamond and Related Materials 5, 1026 (1996).Google Scholar
3.Field, J.E. and Nicholson, E.D., Thin Film Diamond (Chap man Hall, London, UK, 1994).Google Scholar
4.O'Hemn, M.E. and McHargue, C.J., NATO ASI Series, Diamond and Diamond-Like Films and Coatings, Castelvecchio Pascoli, Italy, p. 715 (1990).Google Scholar
5.D'Evelyn, M.P., Slutz, D.E., and Williams, B.E. in Mechanical Behavior of Diamond and Other Forms of Carbon (Mater. Res. Soc. Proc., Pittsburgh, PA, 1995) p. 115.Google Scholar
6.Mechoisky, J.J., Proceedings of the 2nd International Conference on Diamond and Related Materials, (MYU, Tokyo, 1993) p. 199.Google Scholar
7.Kant, A., Drory, M.D., and Ritchie, R.O. in Mechanical Behavior of Diamond and Other Forms of Carbon (Mater. Res. Soc. Proc., Pittsburgh, PA, 1995) pp. 289294.Google Scholar
8.Drory, M.D., Dauskardt, R.H., Kant, A., and Ritchie, R.O., J. AppI. Phys. 78, 3083 (1995).Google Scholar
9.Sharma, S.C., Green, M., Hyer, R.C., Dark, C.A., Black, T.C., Chaurasia, A.R., Chopra, D.R., and Mishra, K.K., J. Mater. Res. 5, 2424 (1990).Google Scholar
10.Oliver, W.C. and Pharr, G.M., J. Mater. Res. 7, 1564 (1992).Google Scholar
11.Antis, G.R., Chantikul, P., Lawn, B.R., and Marshall, D. B., J. Amer. Ceram. Soc. 64, 533 (1981).Google Scholar
12.Nicholson, E.D., Field, J.E., Partridge, P.G., and Ashfold, M.N.R. in Mechanical Behavior of Diamond and Other Forms of Carbon (Mater. Res. Soc. Proc., Pittsburgh, PA, 1995) pp. 101113.Google Scholar
13.Grimsditch, M.H. and Ramdas, A.K., Phys. Rev. B 11, 3139 (1975).Google Scholar
14.Shang, J. K. and Ritchie, R. O., Metall. Trans. A 20, 897 (1989).Google Scholar