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Microstructural Characterization of Multiphase Coatings Produced By Chemical Vapor Deposition

Published online by Cambridge University Press:  21 February 2011

R. A. Lowden ,
K. L. More ,
T. M. Besmann  and
R. D. James
R. A. Lowden
Affiliation:
Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee
K. L. More
Affiliation:
Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee
T. M. Besmann
Affiliation:
Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee
R. D. James
Affiliation:
Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee
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Abstract

Chemical vapor deposition has been utilized to produce ternary, multiphase coatings of various compositions of silicon carbide (SiC) with Ti, Cr, and Mo. Thermodynamic calculations have been performed for a variety of experimental conditions in each system. Scanning, transmission and analytical electron microscopy, and X-ray diffraction techniques have been used to characterize the microstructures and to determine compositions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 168 , 1989 , 159
Copyright
Copyright © Materials Research Society 1990

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