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Microstructural and Photoluminescence Studies on Europium Doped Yttrium Oxide Films Synthesized by Metallorganic Vapor Deposition

Published online by Cambridge University Press:  10 February 2011

G. A. Hirata ,
J. McKittrick ,
J. Yi ,
S. G. Pattillo ,
K. V. Salazar  and
M. Trkula
G. A. Hirata
Affiliation:
Dept. of Applied Mechanics and Engineering Sciences and Materials Science Program, University of California at San Diego, La Jolla, CA 92093–0411, jmckittrick@ucsd.edu
J. McKittrick
Affiliation:
Dept. of Applied Mechanics and Engineering Sciences and Materials Science Program, University of California at San Diego, La Jolla, CA 92093–0411, jmckittrick@ucsd.edu
J. Yi
Affiliation:
Dept. of Applied Mechanics and Engineering Sciences and Materials Science Program, University of California at San Diego, La Jolla, CA 92093–0411, jmckittrick@ucsd.edu
S. G. Pattillo
Affiliation:
Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM 87545
K. V. Salazar
Affiliation:
Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM 87545
M. Trkula
Affiliation:
Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM 87545
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Abstract

The microstructural and luminescence properties of europium doped yttrium oxide (Y2O3:Eu) thin films deposited by metallorganic chemical vapor deposition are presented in this work. It was found that surface morphology, crystallinity and photoluminescent emission properties are strongly dependent on substrate temperature during deposition. The depositions were carried out in a stainless steel chamber using yttrium and europium 2,2,6,6,-tetramethyl–3,5-heptanedionates as volatile precursors and O2 as the reactant gas. Post-annealing increased the crystallite size and decreased the lattice parameter, resulting in an increased photoluminescent emission intensity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 495: Symposium W – Chemical Aspects of Electronic Ceramics Processing , 1997 , 39
Copyright
Copyright © Materials Research Society 1998

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References

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