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MeV Self Ion Beam Induced Amorphisation of Silicon Carbide Surfaces and Its Effect on Their Trdbomechanical Propertdzs

Published online by Cambridge University Press:  28 February 2011

D. K. Sood ,
V. C. Nath  and
Yang Xi
D. K. Sood
Affiliation:
Microelectronics & Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne, 3000, Australia
V. C. Nath
Affiliation:
Microelectronics & Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne, 3000, Australia
Yang Xi
Affiliation:
Microelectronics & Materials Technology Centre, Royal Melbourne Institute of Technology, 124 La Trobe Street, Melbourne, 3000, Australia
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Abstract

Amorphisation of sintered SiC by bombardment with self (C, Si) ions has been studied. Ion doses ranged from 1×1015 to 1×1017 ions/cm2; and ion energy was varied from 0.09 to 5 MeV. Amorphisation was detected by micro-focus Raman scattering. Tribomechanical properties-friction and wear were studied with a high precision pin (steel ball) and disc (implanted) machine. Results show substantial improvements in friction and wear, which persist to a large number of cycles. Tribomechanical properties are shown to correlate with surface amorphisation and carburisation. Carbon ions are found to be much more effective than Si ions (with similar damage distributions) in reducing friction and wear.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 235: Symposium A – Phase Formation and Modification by Beam-Solid Interactions , 1991 , 369
Copyright
Copyright © Materials Research Society 1992

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References

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