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Metastable Materials Formation by ion Beam Assisted Deposition: Application to M Clusters in Ceramic Matrices

Published online by Cambridge University Press:  10 February 2011

C. A. Carosella ,
G. K. Hubler ,
C. M. Cotell  and
S. Schiestel
C. A. Carosella
Affiliation:
Surface Modification Branch, US Naval Research Laboratory, Washington, DC 20375
G. K. Hubler
Affiliation:
Surface Modification Branch, US Naval Research Laboratory, Washington, DC 20375
C. M. Cotell
Affiliation:
Surface Modification Branch, US Naval Research Laboratory, Washington, DC 20375
S. Schiestel
Affiliation:
University of Heidelberg, Germany
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Abstract

The collision cascade, the fundamental event in ion-solid interactions, is responsible for the beneficial effects on thin films deposited by low energy ion beam assisted deposition (IBAD) or by energetic ion assisted deposition processes in general. However, the fundamental implications of the marriage of collision cascades and film growth processes have yet to be fully realized. The first half of this paper reviews the effects of ion bombardment on film growth and reaches some new conclusions. We propose that IBAD represents a different ion-solid interaction in a fundamental sense, and that as such, it should lead to new microstructures unattainable by other materials synthesis methods.

The second part of this paper discusses the deposition of metal nanoclusters in a dielectric matrix by means of beam assisted phase separation (BAPS), a term coined here to describe deposition of phase-separated multicomponent materials. Examples discussed are gold nanoparticles in both niobium oxide and silica matrices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 504: Symposium KK – Atomistic Mechanisms in Beam Synthesis & Irradiation… , 1997 , 289
Copyright
Copyright © Materials Research Society 1998

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References

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