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Metal micromolding with surface engineered inserts

Published online by Cambridge University Press:  01 February 2011

Dongmei Cao ,
J. Jiang  and
W. J. Meng
Dongmei Cao
Affiliation:
dcao2@lsu.edu, Louisiana State University, Mechanical Engineering Dept, Baton Rouge, LA, 70803, United States
J. Jiang
Affiliation:
dcao2@lsu.edu
W. J. Meng
Affiliation:
wmeng@me.lsu.edu
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Abstract

The LiGA (Lithographie, Galvanoformung, Abformung) technique is a leading micromanufacturing process for making polymer- and metal- based high-aspect-ratio microscale structures. Molding replication is the key LiGA step for economical mass production of metal-based HARMS. Using a hybrid technique, we have fabricated microscale Ta mold inserts. Surface engineering of Ta inserts by electrochemical polishing followed by conformal coating deposition has enabled successful high-temperature micromolding of Al and Cu. In this paper, the molding performance of Ta inserts coated with amorphous hydrogenated carbon based coatings and amorphous silicon nitride based coatings is compared. Issues of maximum molding force, demolding force, and coating durability are addressed.

Keywords

coatingTamachining
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 890: Symposium Y – Surface Engineering for Manufacturing Applications , 2005 , 0890-Y03-03
Copyright
Copyright © Materials Research Society 2006

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