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Mechanisms in embedded selective epitaxy and overgrowth of an integrated laser/modulator quantum well structure using MOMBE and MOVPE

Published online by Cambridge University Press:  17 March 2011

Philipp Kröner ,
Horst Baumeister ,
Roland Gessner ,
Josef Rieger ,
Michael Schier ,
Eberhard Veuhoff ,
Othmar Marti  and
Harald Heinecke
Philipp Kröner
Affiliation:
Infineon Technologies, Corporate Research CPR PH, D-81730 Munich, Germany University of Ulm, Department of Experimental Physics, D-89069 Ulm, Germany
Horst Baumeister
Affiliation:
Infineon Technologies, Corporate Research CPR PH, D-81730 Munich, Germany
Roland Gessner
Affiliation:
Infineon Technologies, Corporate Research CPR PH, D-81730 Munich, Germany
Josef Rieger
Affiliation:
Infineon Technologies, Corporate Research CPR PH, D-81730 Munich, Germany
Michael Schier
Affiliation:
Infineon Technologies, Corporate Research CPR PH, D-81730 Munich, Germany
Eberhard Veuhoff
Affiliation:
Infineon Technologies, Corporate Research CPR PH, D-81730 Munich, Germany
Othmar Marti
Affiliation:
University of Ulm, Department of Experimental Physics, D-89069 Ulm, Germany
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Abstract

Lateral integration of optoelectronic devices comprising strained multiple quantum well (MQW) structures can most successfully be accomplished by selective area epitaxy using metal organic molecular beam epitaxy (MOMBE). We optimized the growth parameters with respect to a planar butt coupling and sharp, flat MQW interfaces in an integrated MQW laser / MQW modulator structure. Defect generation in metal organic vapor phase epitaxy (MOVPE) overgrown cladding layers is analyzed and shown to contain information about the quality of the buried butt coupling. A ridge waveguide structure has successfully been fabricated from an optimized integrated laser / modulator structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 648: Symposium P – Growth, Evolution & Properties of Surfaces, Thin Films, and Self Organized Structure , 2000 , P6.46
Copyright
Copyright © Materials Research Society 2001

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References

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