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Mechanics of Elastic Dislocations in Strained Layer Structures

Published online by Cambridge University Press:  22 February 2011

L. B. Freund ,
A. Bower  and
J. C. Ramirez
L. B. Freund
Affiliation:
Division of Engineering, Brown University, Providence, RI 02912
A. Bower
Affiliation:
Division of Engineering, Brown University, Providence, RI 02912
J. C. Ramirez
Affiliation:
Division of Engineering, Brown University, Providence, RI 02912
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Abstract

Application of the elastic continuum theory of dislocations to modeling of phenomena associated with elastic strain relaxation in strained layer epitaxial heterostructures is discussed. The concept of critical thickness for onset of strain relaxation in a strained epitaxial layer is first reviewed, and some extensions to periodic arrays of dislocations and to multiple layers are described. Then, two issues are addressed that arise when the assumptions underlying the critical thickness concept are not met. One issue concerns the nucleation of dislocations at the growth surface of an epitaxial film, particularly the influence of surface irregularities on the activation energy for surface nucleation. A second issue concerns the kinetics of glide of a threading dislocation as it lays down an interface misfit dislocation when the layer thickness exceeds the critical thickness. A generalized driving force for the glide process is defined, and a relationship between this force and the glide speed is proposed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 130: Symposium C – Thin Films: Stresses and Mechanical Properties I , 1988 , 139
Copyright
Copyright © Materials Research Society 1989

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