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Measurement of Particle Densities and Sizes: Application to Silane/Argon Plasmas

Published online by Cambridge University Press:  28 February 2011

Kenneth G. Spears  and
Timothy J. Robinson
Kenneth G. Spears
Affiliation:
Northwestern University, Chemistry Department, 2145 Sheridan Road, Evanston, Illinois 60201
Timothy J. Robinson
Affiliation:
Northwestern University, Chemistry Department, 2145 Sheridan Road, Evanston, Illinois 60201
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Abstract

We discuss new methods for measuring particle number densities, masses and size distributions by laser techniques.These methods do not require assumptions of particle optical properties or instrumental calibration by known particles.We summarize the theoretical basis of these techniques and discuss the light scattering fluctuation analysis, which can yield number density and size information.Experimental data for rf discharges of silane/argon mixtures are briefly presented to illustrate some of the theoretical predictions.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 68: Symposium C – Plasma Processing , 1986 , 121
Copyright
Copyright © Materials Research Society 1986

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