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Magnetically Soft Co-C Granular-like Amorphous Thin Films With High Resistivity and High Saturation Flux Density

Published online by Cambridge University Press:  01 February 2011

H. Wang ,
S.P. Wong ,
M.F. Chiah ,
W.Q. Li ,
C.Y. Poon ,
W.Y. Cheung  and
N. Ke
H. Wang
Affiliation:
Department of Electronic Engineering and Materials Science and Technology Research Center, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, PR China
S.P. Wong
Affiliation:
Department of Electronic Engineering and Materials Science and Technology Research Center, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, PR China
M.F. Chiah
Affiliation:
Department of Electronic Engineering and Materials Science and Technology Research Center, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, PR China
W.Q. Li
Affiliation:
Department of Electronic Engineering and Materials Science and Technology Research Center, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, PR China
C.Y. Poon
Affiliation:
Department of Electronic Engineering and Materials Science and Technology Research Center, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, PR China
W.Y. Cheung
Affiliation:
Department of Electronic Engineering and Materials Science and Technology Research Center, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, PR China
N. Ke
Affiliation:
Department of Electronic Engineering and Materials Science and Technology Research Center, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, PR China
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Abstract

Granular-like amorphous CoxC1-x nanocomposite thin films, with x in the range of 60-75% in atomic percentage, have been prepared by pulsed filtered vacuum arc deposition. The structures of the films were characterized by non-Rutherford backscattering spectrometry, transmission electron microscopy, x-ray diffraction, x-ray photoelectron spectroscopy, and Raman spectroscopy. The in-plane magnetic hysteresis loops were measured by a superconducting quantum interference device magnetometer at room temperature. The electrical transport properties were measured by the four-probe technique at various temperatures ranging from 20 to 300 K. The films were found to be magnetically soft with coercivities in the range of 2 to 12 Oe, resistivities in the range of 130 to 300 μΩcm, and magnetic saturation flux densities in the range of 6 to 13 kG. The films also showed good thermal stability in their structural, electrical and magnetic properties upon annealing up to 200°C in a vacuum furnace.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 721: Symposia E/J – Texture and Microstructure in Electronic and Magnetic Films – Nanostructural Magnetic Materials for Data Storage , 2002 , E6.4
Copyright
Copyright © Materials Research Society 2002

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