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Magnetic and Structural Properties of Mn-implanted Si

Published online by Cambridge University Press:  01 February 2011

M. Bolduc ,
C. Awo-Affouda ,
A. Stollenwerk ,
M. B. Huang ,
F. Ramos ,
G. Agnello  and
V. P. LaBella
M. Bolduc
Affiliation:
College of Nanoscale Science and Engineering, University at Albany-SUNY, Albany New York 12203, USA
C. Awo-Affouda
Affiliation:
College of Nanoscale Science and Engineering, University at Albany-SUNY, Albany New York 12203, USA
A. Stollenwerk
Affiliation:
College of Nanoscale Science and Engineering, University at Albany-SUNY, Albany New York 12203, USA
M. B. Huang
Affiliation:
College of Nanoscale Science and Engineering, University at Albany-SUNY, Albany New York 12203, USA
F. Ramos
Affiliation:
College of Nanoscale Science and Engineering, University at Albany-SUNY, Albany New York 12203, USA
G. Agnello
Affiliation:
College of Nanoscale Science and Engineering, University at Albany-SUNY, Albany New York 12203, USA
V. P. LaBella
Affiliation:
College of Nanoscale Science and Engineering, University at Albany-SUNY, Albany New York 12203, USA
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Abstract

P-type Si wafers (∼1019 cm−3) were implanted with 300 keV Mn+ ions at 350°C to a dose of 1×1016 cm−2, and then annealed at 800°C for 5 min. The magnetic properties with dependence upon temperature were measured by using a Superconducting Quantum Interference Device (SQUID) magnetometer. The Mn-implanted Si compound shows ferromagnetic ordering above room temperature. The saturation magnetization increases by ∼ 2 × after annealing and the Curie temperature is TC > 400 K. The structural properties have been investigated by means of Secondary Ion Mass Spectroscopy (SIMS) depth profiling and Transmission Electron Microscope (TEM) imaging. Measurements showed that the Mn atoms redistribute in the Si crystal due to the thermal annealing and form a band layer composed of nanoscale structures such as crystallites or defects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 853: Symposium I – Fabrication and New Applications of Nanomagnetic Structures , 2004 , I8.4
Copyright
Copyright © Materials Research Society 2005

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