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A Low-Voltage and High Uniformity NEMS Tunable Color Filter Based on Subwavelength Grating

Published online by Cambridge University Press:  09 August 2012

Hiroaki Honma ,
Kazuhiro Takahashi ,
Makoto Ishida  and
Kazuaki Sawada
Hiroaki Honma
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan
Kazuhiro Takahashi
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan JST-CREST, Tokyo, Japan
Makoto Ishida
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan Electronics-Inspired Interdisciplinary Research Institute, Toyohashi University of Technology
Kazuaki Sawada
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan JST-CREST, Tokyo, Japan Electronics-Inspired Interdisciplinary Research Institute, Toyohashi University of Technology
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Abstract

This paper reports a NEMS (Nano Electro Mechanical Syetems) tunable color filter based on subwavelength grating with high color uniformity and low drive voltage. We newly proposed a GVG (Ground-Voltage-Ground) type tunable color filter deployed with a parallel-plate actuator with three pairs of electrode to decrease a crosstalk of an electrostatic attraction force between each actuator. The proposed structure was fabricated using an SOI wafer. The color tuning using was demonstrated by applying the drive voltage of 6.7 V. The reflected light intensity was decreased by 34 % at 680 nm wavelength. The color uniformity was also obtained in the filter area by reducing the variation of the displacement on one-dimensional arrayed actuators.

Keywords

actuatornanostructuremicroelectro-mechanical (MEMS)
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1427: Symposium B – Heterogeneous Integration Challenges of MEMS, Sensor and CMOS LSI , 2012 , mrss12-1427-b02-04
Copyright
Copyright © Materials Research Society 2012

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References

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