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Low-Temperature Selective Growth of Heteroepitaxial α-Al2O3 Thin Films on a NiO Layer by the Electron-Beam Assisted PLD Process

Published online by Cambridge University Press:  01 February 2011

Makoto Hosaka ,
Yasuyuki Akita ,
Yuki Sugimoto ,
Yushi Kato ,
Yusaburo Ono ,
Akifumi Matsuda ,
Koji Koyama  and
Mamoru Yoshimoto
Makoto Hosaka
Affiliation:
hosaka.m.ab@m.titech.ac.jp, Tokyo Institute of Technology, Yokohama, Japan
Yasuyuki Akita
Affiliation:
akita.y.aa@m.titech.ac.jp, Tokyo Institute of Technology, Yokohama, Japan
Yuki Sugimoto
Affiliation:
sugimoto.y.ac@m.titech.ac.jp, Tokyo Institute of Technology, Yokohama, Japan
Yushi Kato
Affiliation:
kato.y.am@m.titech.ac.jp, United States
Yusaburo Ono
Affiliation:
ono.y.ad@m.titech.ac.jp, Tokyo Institute of Technology, Yokohama, Japan
Akifumi Matsuda
Affiliation:
matsuda.a.aa@m.titech.ac.jp, Tokyo Institute of Technology, Yokohama, Japan
Koji Koyama
Affiliation:
k-koyama@namiki.co.jp, Namiki Precision Jewel Co., Ltd., Tokyo, United States
Mamoru Yoshimoto
Affiliation:
yoshimoto.m.aa@m.titech.ac.jp, Tokyo Institute of Technology, Yokohama, Japan
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Abstract

Selective heteroepitaxial growth of α-Al2O3 thin films on a NiO layer was investigated using an electron-beam assisted pulsed laser deposition process. The epitaxial NiO layer was grown on an ultrasmooth sapphire (α-Al2O3 single crystal) (0001) substrate. The α-Al2O3 thin film could be grown epitaxially only in the electron-beam irradiated region of the epitaxial NiO layer at 300°C, while the amorphous Al2O3 film was grown in the non-irradiated region. The homoepitaxial growth of α-Al2O3 thin films could not be attained on the sapphire (0001) substrate at 300°C. This indicates that the electron-beam irradiation enhances heteroepitaxial growth of the α-Al2O3 thin films on the NiO layer at 300°C. When we annealed the epitaxial Al2O3/NiO bilayer film at 350°C in a hydrogen atmosphere, we could reduce only the NiO layer to an epitaxial Ni metal layer, allowing the fabrication of epitaxial Al2O3/Ni (insulator/metal structure) films. The fabricated Al2O3/Ni bilayer films exhibited a very smooth surface.

Keywords

epitaxyelectron irradiationthin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1150: Symposium RR – Artificially Induced Grain Alignment in Thin Films , 2008 , 1150-RR04-04
Copyright
Copyright © Materials Research Society 2009

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References

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