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Layer Formation in CuNi/C X-Ray Optics

Published online by Cambridge University Press:  25 February 2011

A. F. Jankowski  and
D. G. Stearns
A. F. Jankowski
Affiliation:
Chemistry & Materials Science and
D. G. Stearns
Affiliation:
Advanced X Ray Optics Program, Lawrence Livermore National Laboratory, P.O. Box 808, Livermore, California 94550
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Abstract

A series of Cu/C and CuNi/C multilayer films are prepared for potential use as normal incidence x-ray reflectors. The use of a metal alloy layer is intended to enhance layer formation without metastable metallic carbide formation. The films are characterized both in composition and structure. Addition of Ni to the Cu-rich layer is seen to markedly improve the formation of continuous metal layers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 202: Symposium C – Evolution of Thin Film and Surface Microstructure , 1990 , 695
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

1. Ceglio, N.M., Journal of X-Ray Science and Technology 1, 7 (1989).Google Scholar
2. Harvey, J., Zmek, W. and Ftaclas, C., Optical Engineering 29, 603 (1990).Google Scholar
3. Jankowski, A., Schrawyer, L., Wall, M., Craig, W., Morales, R. and Makowiecki, D., Journal of Vacuum Science Technology A7, 2914 (1989).Google Scholar
4. Jankowski, A., Schrawyer, L. and Wall, M., Journal of Applied Physics 68 (1990) in press.Google Scholar
5. Jankowski, A. and Makowiecki, D., in SPIE Vol. 984 X-Rav Multilayers for Diffractometers. Monochromators and Spectrometers (1988) 64.Google Scholar
6. Westwood, W.D., Materials Research Society Bulletin 13 (12), 46 (1988).Google Scholar
7. Somekh, R.E., Journal of Vacuum Science Technology A 2, 1285 (1984).Google Scholar
8. Mezey, L.Z. and Giber, J., Japanese Journal of Applied Physics 21, 1569 (1982).Google Scholar
9. CRC Handbook of Chemistry and Physics 65th Edition, ed. Weast, R.C. (CRC Press, Boca Raton, 1985) F20–26.Google Scholar