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Laser-Induced Surface Modification and Etching of Materials

Published online by Cambridge University Press:  26 February 2011

D. Bauerle ,
M. Eyett ,
U. Kolzer ,
R. Kullmer ,
P. Mogyorosi  and
K. Piglmayer
D. Bauerle
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
M. Eyett
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
U. Kolzer
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
R. Kullmer
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
P. Mogyorosi
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
K. Piglmayer
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
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Abstract

Laser-induced surface reduction and ablation of piezoelectric oxides is described for the examples of BaTi03 and LiNb03.

The microscopic mechanisms involved in the laser-induced etching of single-crystal (100) Si in Cl2 atmosphere are investigated for the regime of low laser powers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 411
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

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