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Laser Induced Surface Chemical Epitaxy of II-VI Materials

Published online by Cambridge University Press:  21 February 2011

Charter D. Stinespring  and
Andrew Freedman
Charter D. Stinespring
Affiliation:
Center for Chemical and Environmental Physics, Aerodyne Research, Inc., Billerica, Massachusetts 01821
Andrew Freedman
Affiliation:
Center for Chemical and Environmental Physics, Aerodyne Research, Inc., Billerica, Massachusetts 01821
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Abstract

Studies of the thermal and photon-induced surface chemistry of dimethyl cadmium (DMCd) and dimethyl tellurium (DMTe) on GaAs(100) substrates under ultrahigh vacuum conditions have been performed for substrate temperatures in the range of 123 K to 473 K. Results indicate that extremely efficient conversion of admixtures of DMTe and DMCd to CdTe can be obtained using low power (5 - 10 mJ cm−2) 193 nm laser pulses at substrate temperatures of 123 K. Subsequent annealing at 473 K produces an epitaxial film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 158: Symposium B – In-Situ Patterning: Selective Area Deposition and Etching , 1989 , 381
Copyright
Copyright © Materials Research Society 1990

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References

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