Hostname: page-component-848d4c4894-xfwgj Total loading time: 0 Render date: 2024-06-19T18:12:26.792Z Has data issue: false hasContentIssue false
  • English
  • Français

Laser Assisted Deposition of Amorphous Hydrogen Containing Carbon at Room Temperature

Published online by Cambridge University Press:  15 February 2011

G. Stenberg ,
K. Piglmayer ,
M. Boman  and
J.-O. Carlsson
G. Stenberg
Affiliation:
Uppsala University, Institute of Chemistry, 751 21 Uppsala, Sweden, gorans@kemi.uu.se
K. Piglmayer
Affiliation:
Angwandte Physik, Johannes-Kepler-univeritát Linz, A-4040 Linz, Austria
M. Boman
Affiliation:
Uppsala University, Institute of Chemistry, 751 21 Uppsala, Sweden, gorans@kemi.uu.se
J.-O. Carlsson
Affiliation:
Uppsala University, Institute of Chemistry, 751 21 Uppsala, Sweden, gorans@kemi.uu.se
Get access

Abstract

Hydrogen-containing amorphous carbon films were produced from CH,I, by photolytical laser assisted chemical vapour deposition at room temperture. An Ar+ laser operated in the ultraviolet spectral region (351 and 364 nm) was used as the excitation source. The beam was focused in parallel to the Si(lOO) substrate. The deposition process was studied for different partial pressures of CH,I2 and for different heights of the laser beam above the substate surface. The mass thickness of the film was determined by energy dispersive X-ray spectrometry. The hydrogen content of the carbon films was determined by nuclear reaction analysis and the iodine content in the films was obtained by Auger electron spectroscopy and energy dispersive X-ray spectrometry. Carbon hybridization was investigated by Raman and infrared spectroscopy while morphology was examined by atomic force microscopy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 613
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 De Martirio, C., Demichelis, F., Tagliaferro, A., Patrini, M., Rizzi, A., Fontaine, M., Layet, J.M., Dia. Rel. Mat. 4, 996 (1994).Google Scholar
2 Robertson, J., Prog. Solid St. Chem. 21, 199 (1991)Google Scholar
3 Taguchi, T., Morikawa, M., Hiratsuka, Y., Toyoda, K.. Amorphous Hvdrogenated Carbon Films edited by Koidl, P., Oelhafen, P. (Eur. Mater. Res. Soc. XVII) 123 Google Scholar
4 Baughcum, S. L., Leone, S. R., J. Chem. Phys. 72 6531, 1980 Google Scholar
5 Stenberg, G., Boman, M., to be publish.Google Scholar
6 Tamor, M. A.. Vassell, W. C., J. Appl. Phys. 76(6) 3823, 1994 Google Scholar