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Laser and Thermal Annealing Modification of Diamond-Like Atomic-Scale Composite Films Studied by Micro Raman Spectroscopy

Published online by Cambridge University Press:  10 February 2011

J. Z. Wan ,
Fred H. Pollak  and
Benjamin F. Dorfman
J. Z. Wan
Affiliation:
Physics Department and New York State Center for Advanced Technology in Ultrafast Photonic Materials and Applications, Brooklyn College of CUNY, Brooklyn, NY 11210, FHPBC@CUNYVM.CUNY.EDU
Fred H. Pollak
Affiliation:
Physics Department and New York State Center for Advanced Technology in Ultrafast Photonic Materials and Applications, Brooklyn College of CUNY, Brooklyn, NY 11210, FHPBC@CUNYVM.CUNY.EDU
Benjamin F. Dorfman
Affiliation:
Atomic Scale Design, Inc., SUNY-Farmingdale, Farmingdale, NY 11735
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Abstract

We have modified the properties of diamond-like atomic-scale composite (DLASC) material of various thicknesses (5 μm – 70 μm) by means of (a) cw Ar-ion laser annealing using a focussed beam (˜ 2 μm spot size) and (b) thermal annealing (400°C≤ T ≤800°C for one hour). These DLASC films [amorphous “diamond-like/quartz-like” a-(C:H/Si:O)] constitute a novel class of diamond-related materials. The annealing effects were investigated by micro-Raman scattering. The laser annealing procedure shows that the structure of these films can be altered locally from amorphous to nano-crystallite depending not only on the parameters of the annealing process (annealing time, laser intensity) but also the mechanical properties (hardness and stress) of the DLASC films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 647
Copyright
Copyright © Materials Research Society 1997

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References

1. Dorfman, V.F., Thin Solid Films 212, 267 (1992); V.F. Dorfman, A. Bozhko, B.N. Pypkin, R.T. Borra, A.R. Srivatsa, H. Zhang, T.A. Skotheim, I. Khan, D. Rodichev and G. Kirpilenko, Thin Solid Films 212, 274 (1992).Google Scholar
2. Dorfman, B. et al, Mat. Res. Soc. Symp. Proc. 351, 43 (1994); B. Dorfman et al, Mat. Res. Soc. Symp. Proc. 349, 547 (1994).Google Scholar
3. Rong, Z.-Y. et al, Appl.Phys. Lett. 65, 1379 (1994).Google Scholar
4. Dorfman, B. et al, Proceedings of the Third International Conference on the Applications of Diamond Films and Related Materials, ed. by Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshika, M. and Murakawa, M., NIST Special Publication 885, p. 769 (1995).Google Scholar
5. Asoka-Kumar, P. et al, J. Vac. Sci. Technol. A13, 1044 (1995).Google Scholar
6. Pollak, F.H. and Dorfman, B., to be published in Thin Solid Films.Google Scholar
7. Dillon, R. O., Woollam, J. A. and Katkanant, V., Phys. Rev. B 29, 3482 (1984).Google Scholar
8. Cho, N. H. et al, J. Mater. Res. 5, 2543 (1990).Google Scholar
9. Yanez-Limon, J. M., Ruiz, F., and Gonzalez-Hernandez, J., Chao, B. S., and Ovshinsky, S. R., J. Appl. Phy. 78, 3015 (1995).Google Scholar
10. Knight, D. S. and White, W. B., J. Mater. Res. 4, 385 (1989).Google Scholar
11. Tuinstra, F. and Koenig, J. L., J. Chem. Phys. 53, 1126 (1970).Google Scholar
12. Nemanich, R. J. and Solin, S. A., Phys. Rev. B 20, 392 (1979).Google Scholar
13. Shroder, R. E. et al, Phys. Rev. B 41, 3738 (1990).Google Scholar
14. See, for example, Pollak, F.H. in Analytical Raman Spectroscopy, ed. by Grasselli, J.C. and Bulkin, B.J. (John Wiley and Sons, New York, 1991) p. 137.Google Scholar
15. Lim, P. K. et al, J. Appl. Phys. 78, 5307 (1995).Google Scholar
16. Gaspari, F. et al, Proceedings of the Third International Conference on the Applications of Diamond Films and Related Materials, ed. by Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., and Murakawa, M., (National Institute of Standards and Technology Special Publication 885) 1995, p. 743.Google Scholar
17. Robertson, J., “Deposition of Diamond-like Carbon”, Chapter 9 in Thin Film Diamond, ed. by Lettington, A. and Steeds, J. W. (Chapman and Hall, New York, 1994).Google Scholar
18. See, for example, Proceedings of the Third International Conference on the Applications of Diamond Films and Related Materials, ed. by Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., and Murakawa, M., (National Institute of Standards and Technology Special Publication 885) 1995, pgs. 121, 137 and 165.Google Scholar
19. Wan, J. Z., Pollak, F.H. and Dorfman, B.F., J. Appl. Phys. (in print).Google Scholar