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The Kinetic Investigation of the Deposition of Alumina and Aluminosilicates from Mixtures of SiCl4, AlCl3, CO2, and H2

Published online by Cambridge University Press:  10 February 2011

Stephanos F. Nitodas  and
Stratis V. Sotirchos
Stephanos F. Nitodas
Affiliation:
Department of Chemical Engineering, University of Rochester, Rochester, NY 14627
Stratis V. Sotirchos
Affiliation:
Department of Chemical Engineering, University of Rochester, Rochester, NY 14627
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Abstract

The codeposition of alumina, silica, and aluminosilicates from mixtures of silicon tetrachloride, aluminum trichloride, carbon dioxide, and hydrogen is investigated in this study. Chemical vapor deposition experiments are carried out in a hot-wall reactor of tubular geometry coupled with an electronic microbalance. In order to elucidate some aspects of the codeposition process, the deposition of pure alumina and pure silica from mixtures of silicon tetrachloride and aluminum trichloride, respectively, with CO2 and H2, is also investigated. Among the most interesting findings of our study is that the presence of AIC13 has a catalytic effect on the incorporation of silica in the deposit, leading to codeposition rates that are higher than the deposition rates that are obtained when only one of the two chlorides (SiCI4 or A1C13) is present in the feed

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 141
Copyright
Copyright © Materials Research Society 1999

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