Hostname: page-component-5c6d5d7d68-xq9c7 Total loading time: 0 Render date: 2024-08-22T05:26:08.093Z Has data issue: false hasContentIssue false
  • English
  • Français

Ion Beam Deposition of Amorphous Carbon Films With Diamond Like Properties

Published online by Cambridge University Press:  15 February 2011

John C. Angus ,
Michael J. Mirtich  and
Edwin G. Wintucky
John C. Angus
Affiliation:
Case Western Reserve University, Cleveland, Ohio 44106
Michael J. Mirtich
Affiliation:
NASA Lewis Research Center, 21000 Brookpark Road, Cleveland, Ohio 44135
Edwin G. Wintucky
Affiliation:
NASA Lewis Research Center, 21000 Brookpark Road, Cleveland, Ohio 44135
Get access

Abstract

Carbon films were deposited on silicon, quartz, and potassium bromide substrates from an ion beam. Growth rates were approximately 0.3 μm/hour. The films were featureless and amorphous and contained only carbon and hydrogen in significant amounts. The density and carbon/hydrogen ratio indicate the film is a hydrogen deficient polymer. One possible structure, consistent with the data, is a random network of methylene linkages and tetrahedrally coordinated carbon atoms.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 7 , 1981 , 433
Copyright
Copyright © Materials Research Society 1982

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Aisenberg, S. and Chabot, R., J. Appl. Phys. 42, 2953 (1971).Google Scholar
2.Aisenberg, S. and Chabot, R.W., J. Vac. Sci. Technol. 10, 104 (1973).Google Scholar
3.Spencer, E.G., Schmidt, P.H., Joy, D.C. and Sansalone, F.J., Appl. Phys. Lett. 29, 118 (1976).Google Scholar
4.Mirtich, M., Ion Beam Deposited Protective Films, AlAA paper 81–0672 Fifteenth International Electric Propulsion Conference, Las Vegas, NV April, 1981.Google Scholar
5.Sovey, J.S., A 30 cm Diameter Argon Ion Source, AlAA paper 76–1017, Key Biscayne, FL, November, 1976.Google Scholar
6.Lurie, P.G. and Wilson, J.M., Industrial Diamond Review (Suppl.), 26, (1976).Google Scholar
7.Hass, T.W., Grant, J.T. and Dooley, G.J. III, J. Appl. Phys. 43, 1853 (1972).Google Scholar
8.Jacobi, K. and Holzl, J., Surface Science 26, 54 (1971).Google Scholar
9.Benninghoven, A., Surface Science 53, 596 (1975).Google Scholar
10.Avram, M. and Mateescu, Gh.D., Infrared Spectroscopy (Robert E. Kreiger Publishing Co., Huntington, N.Y. 1978).Google Scholar
11.Brand, J.C.D. and Eglinton, G., Applications of Spectroscopy to Organic Chemistry (Oldbourne Press, London 1965).Google Scholar
12.Cosslett, Ann and Cosslett, V.E., Brit. J. Appl. Phys. 8, 374 (1957).Google Scholar
13.Carter, G. and Colligon, J.S., Ion Bombardment of Solids, (American Elsevier, New York 1968).Google Scholar