Hostname: page-component-848d4c4894-4rdrl Total loading time: 0 Render date: 2024-06-16T23:55:53.466Z Has data issue: false hasContentIssue false
  • English
  • Français

Investigation of Polymer Micro-Actuators Based on Electrostrictive Poly(vinylidene fluoride-trifluoroethylene) Copolymers

Published online by Cambridge University Press:  11 February 2011

Tian-bing Xu ,
Feng Xia ,
Z.-Y. Cheng  and
Q. M. Zhang
Tian-bing Xu
Affiliation:
NASA/LaRC, Hampton, VA 23681
Feng Xia
Affiliation:
Materials Research Institute and Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802
Z.-Y. Cheng
Affiliation:
Materials Research Institute and Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802
Q. M. Zhang
Affiliation:
Materials Research Institute and Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802
Get access

Abstract

Micromachined actuators based on the electrostrictive P(VDF-TrFE) copolymer, which possesses a high strain (∼5%) and high elastic energy density (∼ 1 J/cm3), have been designed and fabricated. The performance of the devices have been characterized and modeled in terms of the properties of the copolymer and dimensions of the devices. The experimental results on the device responses under high AC fields (electrostrictive mode), weak AC fields in DC field biased state, and frequency dependence, are very close to the modeling results. Due to the large field induced strain and high frequency capability of the electrostrictive P(VDF-TrFE), the device possesses the capability of operation at non-resonance mode with high displacement and force output, and hence, the device is capable to be used over a broad frequency range. For example, for a device of 1 mm lateral dimension, the displacement output can reach more than 50 μm and the ratio of the displacement/applied voltage is more than 20 nm/Vrms. Furthermore, over more than 3 frequency decades (up to 100 kHz), the dispersion of the displacement is less than 20%. The observed performance of the devices indicates that this class of the electrostrictive P(VDF-TrFE) based micro-actuators is attractive for micropumps and valves.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J5.4
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Polla, D. L., Erdman, A. G., Robbins, W. P., Markus, D. T., Diaz-Diaz, J., Rizq, R., Nam, Y., Brickner, H. T., Wang, A., Krulevitch, P., Annu. Rev. Biomed. Eng. 2: 551 (2000).Google Scholar
2. van den Berg, A. and Lammerink, T.S.J., Top. Curr. Chem. 194: 21 (1998).Google Scholar
3. Becker, H. and Locascio, L. E., Talanta 56, 267 (2002).Google Scholar
4. Joung, J., Shen, J., and Grodzinski, P., IEEE Trans. Magnt. 36, 2012 (2000).Google Scholar
5. Benard, W. L., Kahn, H., Heuer, A. H., and Huff, M. A., J. MEMS. 7, 245 (1998).Google Scholar
6. Jager, E.W.H., Smela, E., and Inganas, O., Science 290, 1540 (2000).Google Scholar
7. Zhang, Q. M., Bharti, V., and Zhao, X., Science, 280, 2101 (1998).Google Scholar
8. Cheng, Z.-Y., Bharti, V., Xu, T.-B., Xu, H.S., Mai, T., and Zhang, Q.M., Sens. Actuators A 90, 138 (2001).Google Scholar
9. Xia, F., Cheng, Z.-Y., Xu, H. S., Li, H. F., Zhang, Q. M., Kavarnos, G. J., Ting, Robert Y., Abdel-Sadek, G., and Belfield, K. D., Adv. Mater. 14 (21): 1574 (2002).Google Scholar
10. Rashidian, B. and Allen, M. G., Proc. ASME DSC, 32, 171 (1991).Google Scholar
11. Mo, J.-H., Robinson, A. L., Fitting, D. E., Terry, F. L., and Carson, P. L., IEEE Trans. Electron Devices 37, 134 (1990).Google Scholar
12. Madou, M., Fundamentals of Microfabrication, (CRC Press, New York, 1997) p. 145.Google Scholar
13. Walsh, R. A., Electromechanical design handbook, (McGRAW-HILL, 2000) p. 5.34.Google Scholar
14. Blevins, R. D., Formulas for natural frequency and mode shape, (Krieger Publishing Company, Florida, 1995) p. 413.Google Scholar