Hostname: page-component-76fb5796d-wq484 Total loading time: 0 Render date: 2024-04-26T19:39:16.464Z Has data issue: false hasContentIssue false
  • English
  • Français

Integration of III-V Optoelectronic Components on Si Platform

Published online by Cambridge University Press:  01 February 2011

Alex Katsnelson ,
Vadim Tokranov ,
Michael Yakimov  and
Serge Oktyabrsky
Alex Katsnelson
Affiliation:
UAlbany Institute for Materials, University at Albany – SUNY, Albany, NY 12203, U.S.A
Vadim Tokranov
Affiliation:
UAlbany Institute for Materials, University at Albany – SUNY, Albany, NY 12203, U.S.A
Michael Yakimov
Affiliation:
UAlbany Institute for Materials, University at Albany – SUNY, Albany, NY 12203, U.S.A
Serge Oktyabrsky
Affiliation:
UAlbany Institute for Materials, University at Albany – SUNY, Albany, NY 12203, U.S.A
Get access

Abstract

A method for hybrid integration of III-V optoelectronic components on Si substrate using BCB was demonstrated. The method included bonding, selective wet etching of the GaAs substrate, components separation by wet etching, two-level metallization and lateral oxidation to form optical apertures. Simulations of thermal behavior and mechanical stresses of this integration scheme were performed using finite element analysis, which revealed adequate heat dissipation. Simulations show that this bonding protocol allows reduction of overheating and mechanical stress that enhances the optoelectronic device performance and increases reliability. Electro-luminescence spectrum, I-V and P-T characteristics were measured and compared with a reference homoepitaxial structure and the results of the simulations. Measured thermal impedance was found to be less then two times higher than that for the devices on a host GaAs wafer. Novel method of substrate removal named oxidation lift-off was proposed and demonstrated. This process allows to release a VCSEL structure with epitaxial DBRs and separate individual components on Si, reduces the number of process steps and eventually reduces cost of the fabricated devices. Au/Ge alloy was used for the metal bonding of the test oxidation lift-off structure. Substrate removal, device separation, bonding and formation of the oxide apertures were done within a single processing step.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 783: Symposium B – Materials, Intergration, and Packaging Issues for High-Frequency Devices , 2003 , B7.4
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Oktyabrsky, S., Castracane, J., and Kaloyeros, A., Proc. SPIE, 4652, 213 (2002).Google Scholar
2. Moon, E.-A., Lee, J.-L., and Yoo, H. M., J. Appl. Phys. 84, 3933 (1998)Google Scholar
3. Yablonovitch, E., Gmitter, T., Harbison, J. P., and Bhat, R., Appl. Phys. Lett. 51, 2222 (1987)Google Scholar
4. Bruel, M., Electron. Lett. 31, 1201 (1995).Google Scholar
5. Fournel, F., Moriceau, H., Aspar, B., Rousseau, K., Eymery, J., Rouvière, J.-L., and Magnea, N., Appl. Phys. Lett. 80, 793 (2002)Google Scholar
6. Koley, B., Dagenais, M., Jin, R., Pham, J., Simonis, G., McLane, G., and Stone, D., J. Appl. Phys. 82, 4586 (1997)Google Scholar
7. Todt, R., Dovidenko, K., Katsnelson, A., Tokranov, V., Yakimov, M., and Oktyabrsky, S., In: Progress in Semiconductor Materials for Optoelectronic Applications. Mater. Res. Soc. Proc., 692 (2002) 561–6.Google Scholar
8. Katsnelson, A., Tokranov, V., Yakimov, M., Lamberti, M., and Oktyabrsky, S., In: Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines, Mater. Res. Soc. Proc., 741 (2003) J5.15.1–6.Google Scholar
9. Ebeling, K. J., “Analysis of vertical cavity surface emitting laser diodes (VCSEL)“, Semiconductor quantum optoelectronic, ed. Miller, A., Ebrahimzeden, E. and Finlayson, D.M., (A NATO Advanced Study Institute, 1998), pp. 295–338 Google Scholar