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The Initial Stages of Plasma Synthesis of Diamond Films*

Published online by Cambridge University Press:  25 February 2011

R. Meilunas ,
M.S. Wong ,
K. Sheng ,
T.P. Ong  and
R.P.H. Chang
R. Meilunas
Affiliation:
Dept. of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
M.S. Wong
Affiliation:
Dept. of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
K. Sheng
Affiliation:
Dept. of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
T.P. Ong
Affiliation:
Dept. of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
R.P.H. Chang
Affiliation:
Dept. of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
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Abstract

The effects of plasma starting conditions on the initial stages of diamond nucleation and growth in a microwave plasma have been studied as a function of important deposition parameters. The influence of the substrate temperature on the diamond nucleation rate, quality, and final film morphology has been elucidated through various analytical measurements. The diamond films are characterized with Raman spectroscopy, X-ray diffraction, and scanning electron microscopy. Finally, methods are described for reproducibly controlling the grain size and morphology of the diamond films for tribological and abrasive applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 533
Copyright
Copyright © Materials Research Society 1989

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Footnotes

*

This research is sponsored by DOE Basic Energy Science Division.

References

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