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InGaAs/InP Multiquantum well Structures Grown by Trichloride Vapor Phase Epitaxy

Published online by Cambridge University Press:  28 February 2011

K. W. Wang ,
V. D. Mattera ,
K. Tai ,
S. N. G. Chu ,
D. D. Roccasecca ,
L. Luther  and
G. Livescusecca
K. W. Wang
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
V. D. Mattera
Affiliation:
AT&T Bell Laboratories, Solid State Technology Center, Breinigsville, PA 18031-9359
K. Tai
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
S. N. G. Chu
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
D. D. Roccasecca
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974
L. Luther
Affiliation:
AT&T Bell Laboratories, Solid State Technology Center, Breinigsville, PA 18031-9359
G. Livescusecca
Affiliation:
AT&T Bell Laboratories, Solid State Technology Center, Breinigsville, PA 18031-9359
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Abstract

Long wavelength (l.3pm<X<l.551un) InGaAs/InP multiquantum well (MQW) PIN structures in which the quantum confined Stark effect can be observed, are of particular interest because of their potential for high modulation contrast ratios and high speed operation. The chemistry of trichloride VPE lends itself to the growth of high purity InGaAsP heterostructures which are essential for the realization of high performance optical modulators and switches. In this study, we investigate the application of multi-frit trichloride VPE for the highly uniform epitaxial growth of InGaAs/InP MQW structures on two-inch InP substrates for advanced photonic device applications. The growth of MQW structures with various well thicknesses was studied as was the effect of substrate orientation. The structures have been characterized by infrared absorption and photoluminescence spectroscopy, cross-sectional transmission electron microscopy and double crystal x-ray diffraction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 145: Symposium A – III-V Heterostructures for Electronic/Photonic Devices , 1989 , 85
Copyright
Copyright © Materials Research Society 1989

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