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(In,Ga)As Quantum Dot Array Formation by Self-Organized Anisotropic Strain Engineering of an (In,Ga)As/GaAs Quantum Wire Template: Shallow-Pattern Effects

Published online by Cambridge University Press:  01 February 2011

T. Mano ,
R. Nötzel ,
G. J. Hamhuis ,
T. J. Eijkemans ,
E. Smalbrugge  and
J. H. Wolter
T. Mano
Affiliation:
eiTT/COBRA Inter-University Research Institute, Eindhoven University of TechnologyP. O. Box 513, 5600MB Eindhoven, the Netherlands
R. Nötzel
Affiliation:
eiTT/COBRA Inter-University Research Institute, Eindhoven University of TechnologyP. O. Box 513, 5600MB Eindhoven, the Netherlands
G. J. Hamhuis
Affiliation:
eiTT/COBRA Inter-University Research Institute, Eindhoven University of TechnologyP. O. Box 513, 5600MB Eindhoven, the Netherlands
T. J. Eijkemans
Affiliation:
eiTT/COBRA Inter-University Research Institute, Eindhoven University of TechnologyP. O. Box 513, 5600MB Eindhoven, the Netherlands
E. Smalbrugge
Affiliation:
eiTT/COBRA Inter-University Research Institute, Eindhoven University of TechnologyP. O. Box 513, 5600MB Eindhoven, the Netherlands
J. H. Wolter
Affiliation:
eiTT/COBRA Inter-University Research Institute, Eindhoven University of TechnologyP. O. Box 513, 5600MB Eindhoven, the Netherlands
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Abstract

One-dimensional (In,Ga)As quantum dot (QD) arrays are formed on planar singular and shallow-patterned (mesa gratings) GaAs (100) substrates by self-organized anisotropic strain engineering of an (In,Ga)As/GaAs quantum wire (QWR) superlattice (SL) template in molecular beam epitaxy. On planar singular substrates, highly uniform one-dimensional single QD arrays, which are extended over 10 μm length, are realized with efficient photoluminescence. The shallow mesa gratings along [0–11] and [011] induce two different types of steps which differently affect the surface migration processes crucial for QWR template development, i.e., strain driven In adatom migration along [011] and surface reconstruction induced adatom migration along [0–11]. While type-A steps along [0–11] have no significant effect on the adatom migration along [011] and [0–11], type-B steps along [011] hinder the surface reconstruction induced migration along [0–11] to prevent formation of QWR and ordered QD arrays.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 794: Symposium T – Self-Organized Processes in Semiconductor Heteroepitaxy , 2003 , T4.5
Copyright
Copyright © Materials Research Society 2004

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References

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