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The Impact of Gas Phase and Surface Chemical Reactions on Step Coverage in Lpcvd

Published online by Cambridge University Press:  22 February 2011

Gregory B. Raupp  and
Timothy S. Cale
Gregory B. Raupp
Affiliation:
Department of Chemical, Bio and Materials Engineering Center for Solid State Electronics Research Arizona State University, Tempe, Arizona 85287–6006
Timothy S. Cale
Affiliation:
Department of Chemical, Bio and Materials Engineering Center for Solid State Electronics Research Arizona State University, Tempe, Arizona 85287–6006
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Abstract

The characteristic step coverage behavior which a given LPCVD process exhibits depends on the nature of the controlling gas phase and/or surface chemical reactions. Physically-based ballistic transport and reaction film profile evolution simulation has provided a structure wherein the origins of step coverage limitations can be understood in the context of the interaction of transport and the controlling chemistry. Based on comparisons of the simulations to literature and in-house experimental data, we have categorized LPCVD mechanisms into one of three types. In heterogeneous deposition, conformal step coverage can usually be found under at least some process conditions. Step coverage typically degrades with increasing deposition temperature. In homogeneous precursor-mediateddeposition, a reactive intermediate is formed in the gas-phase above the wafer surface, resulting in poor to moderate step coverage. Step coverage may or may not degrade with increasing temperature. In byproduct-inhibited deposition, a gas-phase byproduct generated via a surface reaction readsorbs on the growing film surface and slows the deposition rate, yielding a poor to moderate, relatively temperature-insensitive step coverage. Poor step coverage is manifested in a marked film thickness discontinuity at the feature mouth, with a relatively uniform film down the feature sidewalls.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 334: Symposium W – Gas-Phase and Surface Chemistry in Electronic Materials Processing , 1993 , 471
Copyright
Copyright © Materials Research Society 1994

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