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High Temperature X-Ray Diffraction Study of PbTio3 Thin Films Grown on Mgo(001) by MOCVD

Published online by Cambridge University Press:  10 February 2011

R.S. Batzer ,
Biming Yen ,
Donhang Liu ,
H. Kubo ,
G.R. Bai  and
Haydn Chen
R.S. Batzer
Affiliation:
Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA
Biming Yen
Affiliation:
Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA
Donhang Liu
Affiliation:
Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA
H. Kubo
Affiliation:
Nippon Steel Company, Kawasaki, Japan
G.R. Bai
Affiliation:
Argonne National Laboratory, Materials Science Division, Argonne, IL 60493 USA
Haydn Chen
Affiliation:
Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA
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Abstract

Lead titanate (PT) is ferroelectric in its tetragonal phase (c/a=1.06). The domain formation is coupled to the relaxation of internal stress generated by a combination of lattice mismatch, transformation strain and differential thermal stress. The mechanism of domain formation in an epitaxially grown PT film is related to the substrate type and the growth temperature. In this study, PT films have been deposited on MgO(001) in a coldwall, horizontal metal organic chemical vapor deposition (MOCVD) system. The structure of domains and their evolution have been measured as a function of temperature by the x-ray diffraction method using a hot stage. Domain structure changes were observed by θ−2θ scans, ω scans, as well as in-plane φ scans. Effect of film stress on the ferroelectric transition temperature is discussed. Reproducibility of domain formation as a result of temperature cycling both below and above Tc is assessed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 415: Symposium BB – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics II , 1995 , 207
Copyright
Copyright © Materials Research Society 1996

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References

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