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Growth Mode at the Ge/(1102) Sapphire Interface

Published online by Cambridge University Press:  25 February 2011

Geoffrey P. Malafsky*
Affiliation:
Naval Research Laboratory, Wash, DC 20375-5000
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Abstract

The growth mode of Ge on the (1102) surface of sapphire is explored with X-ray photoelectron spectroscopy. Ge exists in two bonding states at the interface, Ge-Ge and Ge-sapphire. Ge forms islands at submonolayer coverage for deposition temperatures of 25°C and 625°C. The formation of the islands is revealed by the rapid increase in the relative fraction of the Ge-Ge bonding state for Ge coverage less than 1 ML. The shift in the Ge-Ge peak binding energy to the bulk Ge value at less than i ML suggests that the islands are three dimensional for deposition at 625°C.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1. Vasudev, P. K., in Epitaxial Silicon Technology, ed. by Baliga, B. J., 233 (Academic Press Inc., NY 1986)Google Scholar
2. Godbey, D. J., Qadri, S. B., Twigg, M. E., and Richmond, E. D., Appl Phys Lett, 54, 2449 (1989)Google Scholar
3. Pelligrino, J. G., Richmond, E. D., and Twigg, M. E. in SOI and Buried Layers, (Mater. Res. Soc. Proc. 116, Pittsburgh, PA 1988), 389 Google Scholar
4. Reichelt, K., Vacuum, 38, 1083 (1988)Google Scholar
5. Handbook of X-Ray Photoelectron Spectroscopy, ed. by Wagner, C. D., Riggs, W. M., Davis, L. E, Maulder, J. F., and Muilenberg, G. E. (Perkin-Elmer, Eden Prairie, MN 1978)Google Scholar
6. Giudice, M. del, Joyce, J. J., and Weaver, J. H., Phys Rev B, 36, 4761 (1987)Google Scholar