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Growth Behaviour of Engineered Porous Thin Films – Measurement and Modeling

Published online by Cambridge University Press:  17 March 2011

D. Vick ,
T. Smy ,
B. Dick ,
S. Kennedy  and
M. J. Brett
D. Vick
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G7vick@ee.ualberta.ca
T. Smy
Affiliation:
Department of Electronics, Carleton University, Ottawa, ON, Canada K1S 5B6
B. Dick
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G7
S. Kennedy
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G7
M. J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2G7
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Abstract

Recent experimental work has demonstrated that unique high porosity thin films may be ob- tained in physical deposition systems by combining glancing angle deposition with in situ sub-strate motion control [1-7]. The microstructure of these films consists of isolated columns engineered into shapes such as helices, posts, or chevrons. Due to the isolated nature of the columns, the films present a unique opportunity to study fundamental thin film growth behaviour and, in particular, the influence of the self shadowing mechanism in three dimensions. Apart from this academic motivation, there is the need to characterize the physical constraints imposed on the engineering of these films. In particular, this study will have implications for the realization of isolated, periodically arranged nanostructures envisioned for certain applications. Preliminary results from an ongoing study of growth dynamics, morphology, porosity, and scaling behaviour, and the dependence of these features on deposition parameters are presented below.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 648: Symposium P – Growth, Evolution & Properties of Surfaces, Thin Films, and Self Organized Structure , 2000 , P3.43
Copyright
Copyright © Materials Research Society 2001

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