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Growth and Characterization of Polycrystalline Diamond Thin Films on Porous Silicon by Hot Filament Chemical Vapor Deposition

Published online by Cambridge University Press:  15 February 2011

S. Mirzakuchaki ,
E. J. Charlson ,
E. M. Charlson ,
T. Stacy ,
F. Shahedipour  and
H. W. White
S. Mirzakuchaki
Affiliation:
Electrical Engineering Department, University of Missouri-Columbia, Columbia, MO. 65211
E. J. Charlson
Affiliation:
Electrical Engineering Department, University of Missouri-Columbia, Columbia, MO. 65211
E. M. Charlson
Affiliation:
Electrical Engineering Department, University of Missouri-Columbia, Columbia, MO. 65211
T. Stacy
Affiliation:
Electrical Engineering Department, University of Missouri-Columbia, Columbia, MO. 65211
F. Shahedipour
Affiliation:
Department of Physics and Astronomy, University of Missouri-Columbia, Columbia, MO. 65211
H. W. White
Affiliation:
Department of Physics and Astronomy, University of Missouri-Columbia, Columbia, MO. 65211
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Abstract

Hot filament chemical vapor deposition (HFCVD) was utilized to grow high quality diamond film on porous silicon (PS) substrates to a thickness of 5–6 μm. Boron-doped silicon substrates of <100> orientation and resistivity of 5–15 ohm-cm were anodized by the electrochemical process to form PS. A slurry of diamond paste (1/4 micron average grain size) was rubbed on the samples for a few seconds before introduction into the chamber. Diamond film growth on the PS has the advantages of shorter incubation time and higher nucleation density as evident from scanning electron microscopy (SEM). The results of X-ray diffraction confirm the growth of predominatly (111) oriented high quality diamond film. Electrical properties were also studied by sputtering circular gold contacts on top of diamond film and measuring current-voltage (I-V) characteristics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 423: Symposium E – III-Nitride, SiC, and Diamond Materials for Electronic , 1996 , 415
Copyright
Copyright © Materials Research Society 1996

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