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Gas-Phase Generation of Nanometer-Sized Metal Particles for Fabrication of Zero-Dimensional Quantum Structures

Published online by Cambridge University Press:  22 February 2011

Tammy C. Pluym ,
T.T. Kodas ,
L.M. Wang ,
A. Wiedensohler ,
H.C. Hansson ,
L. Maximov  and
L. Samuelson
Tammy C. Pluym
Affiliation:
University of New Mexico, Center for Micro-Engineered Ceramics, Chemical Engineering Department, Albuquerque, NM 87131
T.T. Kodas
Affiliation:
University of New Mexico, Center for Micro-Engineered Ceramics, Chemical Engineering Department, Albuquerque, NM 87131
L.M. Wang
Affiliation:
University of New Mexico, Geology Department, Albuquerque, NM 87131
A. Wiedensohler
Affiliation:
University of Lund, Department of Nuclear Physics, Solvegatan 14, S-22362 Lund, Sweden
H.C. Hansson
Affiliation:
University of Lund, Department of Nuclear Physics, Solvegatan 14, S-22362 Lund, Sweden
L. Maximov
Affiliation:
University of Lund, Department of Solid State Physics, Solvegatan 14, S-22362 Lund, Sweden
L. Samuelson
Affiliation:
University of Lund, Department of Solid State Physics, Solvegatan 14, S-22362 Lund, Sweden
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Abstract

Nanometer-sized particles of Mo, Ta, Nb, and Pd were formed by gas-phase reactions of metal halides and β-diketonates in the presence of hydrogen. Particle diameters ranged from 5-100 nm depending on the reaction temperature (500-950 βC) and precursor characteristics. Gasphase particle concentrations reached 108/cm3. These particles are suitable as etching masks on semiconductor substrates for generation of zero-dimensional quantum structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 300: Symposium D1 – III-V Electronic and Photonic Device Fabrication and Performance , 1993 , 465
Copyright
Copyright © Materials Research Society 1993

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References

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