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Fracture Properties of Porous MSSQ Films: Impact of Porogen Loading and Burnout

Published online by Cambridge University Press:  01 February 2011

Markus D Ong ,
Vincent Jousseaume ,
Sylvain Maitrejean  and
Reinhold H. Dauskardt
Markus D Ong
Affiliation:
ong15@stanford.edu, Stanford University, Materials Science and Engineering, 1033 Crestview Dr Apt 216, Mountain View, California, 94040, United States, (650) 723-3268
Vincent Jousseaume
Affiliation:
vincent.jousseaume@cea.fr, CEA-LETI, Grenoble, N/A, N/A, France
Sylvain Maitrejean
Affiliation:
sylvain.maitrejean@cea.fr, CEA-LETI, Grenoble, N/A, N/A, France
Reinhold H. Dauskardt
Affiliation:
dauskardt@stanford.edu, Stanford University, Materials Science and Engineering, Stanford, CA, 94305, United States
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Abstract

This work investigates the effect of porogen loading on the fracture properties of methylsilsesquioxane (MSSQ) both before and after the porogen burnout process. The fracture behavior of the hybrid porogen/matrix materials differed significantly from that of the post-burnout materials. The most notable differences were alternative fracture paths and a trend of increasing fracture energy with increasing porogen loading. Characterization of the fracture surfaces indicate increasing amounts of carbon at the fracture interface corresponding to the increases in fracture energy and suggest bridging porogen molecules may be responsible for the increase in adhesion for the hybrid materials.

Keywords

fracturedielectricporosity
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 914: Symposium F – Materials, Technology and Reliability of Low-k Dielectrics and Copper Interconnects , 2006 , 0914-F04-07
Copyright
Copyright © Materials Research Society 2006

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References

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