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Formation of Highly Porous Gas-sensing Films by In-situ Thermophoretic Deposition of Nanoparticles from Aerosol Phase

Published online by Cambridge University Press:  01 February 2011

Thorsten Sahm ,
Weizhi Rong ,
Nicolae Barsan ,
Lutz Mädler ,
Sheldon K. Friedlander  and
Udo Weimar
Thorsten Sahm
Affiliation:
thorsten.sahm@ipc.uni-tuebingen.deUniversity of TuebingenInstitute of Physical ChemistryTuebingen N/AGermany
Weizhi Rong
Affiliation:
weizhi@seas.ucla.edu, University of California, Department of Chemical and Biomolecular Engineering, Los Angeles, California, CA 90095-1592, United States
Nicolae Barsan
Affiliation:
nb@ipc.uni-tuebingen.de, University of Tuebingen, Institute of Physical Chemistry, Tuebingen, N/A, N/A, Germany
Lutz Mädler
Affiliation:
lutz@seas.ucla.edu, University of California, Department of Chemical and Biomolecular Engineering, Los Angeles, California, CA 90095-1592, United States
Sheldon K. Friedlander
Affiliation:
skf@ucla.edu, University of California, Department of Chemical and Biomolecular Engineering, Los Angeles, California, CA 90095-1592, United States
Udo Weimar
Affiliation:
upw@ipc.uni-tuebingen.de, University of Tuebingen, Institute of Physical Chemistry, Tuebingen, N/A, N/A, Germany
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Abstract

Gas sensors based on tin dioxide nanoparticles show high sensitivity to reducing and oxidizing gases. Dry aerosol synthesis applying the flame spray pyrolysis was used for manufacture and directly (in-situ) deposit nanoparticles on sensor substrates. For the first time this technique has been used to synthesize a combination of two stacked porous layers for gas sensor fabrication. Compared to state-of-the-art techniques, aerosol technology provides a direct and versatile method to produce homogeneous nanoparticle films. Two different sensing layers were deposited directly on interdigital ceramic substrates. These porous bottom layers consisted either of pure tin dioxide or palladium doped tin dioxide. The top layer was a palladium doped alumina nanoparticle film which served as a chemical filter. The fabricated gas sensors were tested with methane, CO and ethanol. In case of CH4 detection, the pure tin dioxide sensor with the Pd/Al2O3 filter layer showed higher sensor signals and significantly improved analyte selectivity with respect to water vapor compared to single tin dioxide films. At temperatures up to 250°C the Pd-doping of the tin dioxide strongly increased the sensitivity to all gases. At higher temperatures the sensor signal significantly decreased for the Pd/SnO2 sensor with a Pd/Al2O3 filter on top indicating high catalytic activity.

Keywords

spray pyrolysissensorelectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 915: Symposium R – Nanostructured Materials and Hybrid Composites for Gas Sensors and Biomedical Applications , 2006 , 0915-R07-03
Copyright
Copyright © Materials Research Society 2006

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