Hostname: page-component-848d4c4894-mwx4w Total loading time: 0 Render date: 2024-07-04T01:46:02.084Z Has data issue: false hasContentIssue false
  • English
  • Français

Ferroelectric Thin Films for Microactuator Applications

Published online by Cambridge University Press:  25 February 2011

Jiayu Chen ,
K. R. Udayakumar ,
Keith G. Brooks  and
L. Eric. Cross
Jiayu Chen
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
K. R. Udayakumar
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
Keith G. Brooks
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
L. Eric. Cross
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
Get access

Abstract

Ferroelectric thin films of PZT and PMN-PT were fabricated by the solgel spin-on technique. The films show high dielectric constants, polarization and breakdown strength values. Using a laser interferometer (ultradilatometer), the piezoelectric and electrostrictive coefficients of the films were measured. The results indicate that the sol-gel derived ferroelectric thin films have good electromechanical properties and can be used in rnicroactuator applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 361
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[l] Zhang, Q.M., Jang, S.J. and Cross, L.E., J.Appl. Phys., 65 (7), (1989)Google Scholar
[2] Tjhen, W. et al. Proceedings of the 4th 1EEE MEMS workshop, Nara, Japan, 114 (1991)Google Scholar
[3] Udayakumar, K.R. et al. , Proceedings of the 4th LEEE MEMS workshop, N ara, J apant, 109(1991)Google Scholar
[4] Udayakumar, K.R., Chen, J., Krupanidhi, S.B., and Cross, L.E., Proceedings of the 7th int. Symp. on Applications of Ferroelectrics, Champaign, IL, (1990)Google Scholar
[5] Hagimura, A. and Uchino, K., Ferroelectrics 93, (1989)Google Scholar
[6] Chen, J., Udayakumar, K.R., Brooks, K.G., and Cross, L.E., J. AppI. Phys. (accepted)Google Scholar