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Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method

Published online by Cambridge University Press:  01 February 2011

Takeshi Morita ,
Yasuo Wagatsuma ,
Yasuo Cho ,
Hitoshi Morioka ,
Hiroshi Funakubo  and
Setter Nava
Takeshi Morita
Affiliation:
Research Institute of Electrical Communication, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai, Miyagi, 980–8577, Japan
Yasuo Wagatsuma
Affiliation:
Research Institute of Electrical Communication, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai, Miyagi, 980–8577, Japan
Yasuo Cho
Affiliation:
Research Institute of Electrical Communication, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai, Miyagi, 980–8577, Japan
Hitoshi Morioka
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, GI-405, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226–8502, Japan
Hiroshi Funakubo
Affiliation:
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, GI-405, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226–8502, Japan
Setter Nava
Affiliation:
Ceramics Laboratory, Faculty of Engineering, Material Institute, Swiss Federal Institute of Technology (EPFL), CH-1015 Lausanne, Switzerland
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Abstract

Hydrothermal method has various advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure and a large thickness. Although epitaxial PZT thin film deposition has reported, ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The present paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, 200 nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin was deposited on SrRuO3. The remanent polarization 2Pr for PZT on SrRuO3/SrTiO3 (001) was 19.5 μC/cm2 and that of PZT on SrRuO3/SrTiO3 (111) was 37.2 μC/cm2 respectively. The self alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 784: Symposium C – Ferroelectric Thin Films XII , 2003 , C11.31
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

1. Morita, T., Sensors and Actuators, 103–3, 291 (2003).Google Scholar
2. Ledermann, N., Muralt, P., Baborowski, J., Gentil, S., Mukati, K., Cantoni, M., Seifert, A. and Setter, N., Sensors and Actuators, A105, 162 (2003)Google Scholar
3. Shimomura, K., Tsurumi, T., Ohba, Y. and Daimon, M., Jpn, J. Appl. Phys., 30(9B), 2174 (1991)Google Scholar
4. Morita, T., Kanda, T., Yamagata, Y., Kurosawa, M.K. and Higuchi, T., Jpn. J. Appl. Phys., 36(5B), 2998 (1997)Google Scholar
5. Morita, T., Kurosawa, MK. and Higuchi, T., Ferroelectrics and Frequency Control, 45(5), 1178 (1998)Google Scholar
6. Morita, T., Kurosawa, MK. and Higuchi, T., Sensors and Actuators, 83, 225 (2000)Google Scholar
7. Chien, AT., Speck, JS. and Lange, FF., J. Mater. Res., 12–5, 1176 (1997)Google Scholar
8. Oledzka, M., Lencka, MM., Pinceloup, P., Mikulka-Bolen, K., McCandlish, L.E. and Riman, RE., Chem. Mater. 15, 1090 (2003)Google Scholar
9. Takahashi, K., Oikawa, T., Saito, K., Kaneko, S., Fujisawa, H., Shimizu, M. and Fu-nakubo, H., Jpn. J. Appl. Phys. 41(8), 5376 (2002)Google Scholar