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Fast Neutral Ar Penetration during Gas Cluster Ion Beam Irradiation into Magnetic Thin Films

Published online by Cambridge University Press:  01 February 2011

Shigeru Kakuta ,
Toshio Seki ,
Shinji Sasaki ,
Kenji Furusawa ,
Takaaki Aoki  and
Jiro Matsuo
Shigeru Kakuta
Affiliation:
Storage Technology Research Center, Hitachi, Ltd., 292 Yoshida-cho Totsuka-ku, Yokohama 244–0817, Japan Collaborative Research Center for Advanced Quantum Beam Process Technology, Japan
Toshio Seki
Affiliation:
Quantum Science and Engineering Center, Kyoto Univ., Yoshida-honmachi Sakyo-ku, Kyoto 606–8501, Japan Collaborative Research Center for Advanced Quantum Beam Process Technology, Japan
Shinji Sasaki
Affiliation:
Storage Technology Research Center, Hitachi, Ltd., 292 Yoshida-cho Totsuka-ku, Yokohama 244–0817, Japan Collaborative Research Center for Advanced Quantum Beam Process Technology, Japan
Kenji Furusawa
Affiliation:
Storage Technology Research Center, Hitachi, Ltd., 292 Yoshida-cho Totsuka-ku, Yokohama 244–0817, Japan Collaborative Research Center for Advanced Quantum Beam Process Technology, Japan
Takaaki Aoki
Affiliation:
Quantum Science and Engineering Center, Kyoto Univ., Yoshida-honmachi Sakyo-ku, Kyoto 606–8501, Japan Collaborative Research Center for Advanced Quantum Beam Process Technology, Japan
Jiro Matsuo
Affiliation:
Quantum Science and Engineering Center, Kyoto Univ., Yoshida-honmachi Sakyo-ku, Kyoto 606–8501, Japan
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Abstract

Ar penetration during gas cluster ion beam (GCIB) irradiation has been investigated using secondary ion mass spectroscopy (SIMS). The concentration of Ar rose to a maximum and then decreased gradually with increasing depth. The depth of the Ar penetration peak increased in proportion to the cube root of the acceleration voltage of GCIB and was independent of ion dose. Ar penetration was attributed to fast neutrals in the GCIB and was successfully suppressed by decreasing the pressure of the space downstream of the GCIB or decreasing the monomer ion density in order to suppress charge transfer collisions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 792: Symposium R – Radiation Effects and Ion Beam Processing of Materials , 2003 , R9.36
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

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