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Fabrication of Photonic Crystal Biosensors using Micro-molding of Nanoporous Glass

Published online by Cambridge University Press:  01 February 2011

Ian D. Block ,
Leo L Chan  and
Brian T Cunningham
Ian D. Block
Affiliation:
iblock2@uiuc.edu, University of Illinois at Urbana-Champaign, 201 N Wright St, Urbana, IL, 61801, United States
Leo L Chan
Affiliation:
lchan1@uiuc.edu
Brian T Cunningham
Affiliation:
bcunning@uiuc.edu
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Abstract

We demonstrate a micro-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼3”×”) label-free photonic crystal optical biosensors. SEM images show that the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach accurately and quickly revealed porous glass patterned over a large area with geometrical and material properties uniform within 1%. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.

Keywords

sol-gelnanostructureoptical
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 900: Symposium O – Nanoparticles and Nanostructures in Sensors and Catalysis , 2005 , 0900-O03-07
Copyright
Copyright © Materials Research Society 2006

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References

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