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Excimer Laser Photolysis of Organometallic Compounds Adsorbed on Substrates

Published online by Cambridge University Press:  26 February 2011

Hideyuki Suzuki ,
Koji Mori ,
Masahiro Kawasaki  and
Hiroyasu Sato
Hideyuki Suzuki
Affiliation:
Chemistry Department of Resources, Faculty of Engineering, Mi'e University, Tsu 514, Japan
Koji Mori
Affiliation:
Chemistry Department of Resources, Faculty of Engineering, Mi'e University, Tsu 514, Japan
Masahiro Kawasaki
Affiliation:
Chemistry Department of Resources, Faculty of Engineering, Mi'e University, Tsu 514, Japan
Hiroyasu Sato
Affiliation:
Chemistry Department of Resources, Faculty of Engineering, Mi'e University, Tsu 514, Japan
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Abstract

Excimer laser photolysis at 248 nm of trimethylgal1ium (TMG) was studied by probing gallium atoms by laser induced fluorescence (LIF) technique. From the dependence of LIF intensity on the excitation wavelength, temperature and pressure, a thermally assisted photodissociation in the chemisorbed state was concluded.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 217
Copyright
Copyright © Materials Research Society 1998

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References

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