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Evaluating Mechanical Properties of Thin Layers using Nanoindentation and Finite-Element Modeling: Implanted Metals and Deposited Layers

Published online by Cambridge University Press:  03 September 2012

J. A. Knapp ,
D. M. Follstaedt ,
J. C. Barbour ,
S. M. Myers ,
J. W. Ager ,
O. R. Monteiro  and
I. G. Brown
J. A. Knapp
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
D. M. Follstaedt
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
J. C. Barbour
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
S. M. Myers
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
J. W. Ager
Affiliation:
Lawrence Berkeley National Laboratory, Berkeley, CA 94720
O. R. Monteiro
Affiliation:
Lawrence Berkeley National Laboratory, Berkeley, CA 94720
I. G. Brown
Affiliation:
Lawrence Berkeley National Laboratory, Berkeley, CA 94720
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Abstract

We present a methodology based on finite-element modeling of nanoindentation data to extract reliable and accurate mechanical properties from thin, hard films and surface-modified layers on softer substrates. The method deduces the yield stress, Young's modulus, and hardness from indentations as deep as 50% of the layer thickness.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 438: Symposium A – Materials Modificaton and Synthesis by Ion Beam… , 1996 , 617
Copyright
Copyright © Materials Research Society 1997

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