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Epitaxy and Monolayer Patterning of Solution-Derived LiNbO3 Thin Layers

Published online by Cambridge University Press:  15 February 2011

P.G. Clem ,
Z. Xu  and
D. A. Payne
P.G. Clem
Affiliation:
Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, and Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801
Z. Xu
Affiliation:
Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, and Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801
D. A. Payne
Affiliation:
Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, and Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801
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Abstract

Integrated lithium niobate (LiNbO3) thin layers show promise for efficient electrooptic, nonlinear optic, and optical amplifier applications. Solution-derived LiNbO3 thin layers have been deposited on sapphire substrates, allowing low temperature processing, control of stoichiometry, uniform doping and heteroepitaxy. Transmission electron microscopy of the LiNbO3/substrate interface suggests the structure consists of highly oriented grains with slight rotational variance to accommodate lattice mismatch. For use of such films as devices, the ability to pattern waveguides and other structures is desired. Modification of the substrate surface with patterns of hydrophobic monolayers allows control of deposition of solution precursors. Ambient, selective deposition of (00.1) oriented LiNbO3 heteroepitaxial strip waveguides with lateral dimensions as small as 4μm is demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 401: Symposium G – Epitaxial Oxide Thin Films II , 1995 , 249
Copyright
Copyright © Materials Research Society 1996

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