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Energy-Filtered Electron Diffraction from Silica Thin Films

Published online by Cambridge University Press:  22 February 2011

L. C. Qin
Affiliation:
Department of Materials Science and Engineering, Massachusetts Institute of Technology Cambridge, Massachusetts 02139, USA
L. W. Hobbs
Affiliation:
Department of Materials Science and Engineering, Massachusetts Institute of Technology Cambridge, Massachusetts 02139, USA
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Abstract

Energy filtering has been applied to electron diffraction patterns to obtain electron scattering intensity data of single energy collected using a scanning transmission electron microscope. For amorphous materials, the technique permits reconstruction of radial distribution functions from elastically scattered electron intensity data; amorphous silica thin films have been analyzed in the present experiments. The radial distribution functions are characterized in terms of interatomic distances and are compared to neutron scattering results in the form of total correlation functions.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

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References

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