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Electron Field Emission from Nano-Diamond Films

Published online by Cambridge University Press:  17 March 2011

S.G. Wang ,
Q. Zhang ,
S.F. Yoon ,
J. Ahn ,
Q. Wang ,
D.J. Yang  and
Q.F. Huang
S.G. Wang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
Q. Zhang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
S.F. Yoon
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
J. Ahn
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
Q. Wang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
D.J. Yang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
Q.F. Huang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
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Abstract

In this paper, the field emission properties of nano-diamond films were investigated by measuring the curves of emission current density (J) versus applied electric field (E). The nano-diamond films were prepared on n-type (100) silicon substrate by microwave plasma enhanced chemical vapor deposition (MPECVD) technique using a gas mixture of nitrogen-methane-hydrogen. Field emission results show that, with increasing hydrogen gas flow ratio of [H2]/[N2+CH4+H2] from 0 to 10 %, diamond grain size increases from 5 to 60 nm, threshold electric field for electron field emission increases from 1.2 to 5.75 V/μm, and emission current density decreases from 820 to 560 μA/cm2, demonstrating that small grain size nano-diamond films are promising as a cathode material for low-field electron emitters.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 704: Symposium W – Nanoparticulate Materials , 2001 , W3.3.1
Copyright
Copyright © Materials Research Society 2002

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