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Electron Beam Induced Decomposition of Palladium Acetate

Published online by Cambridge University Press:  25 February 2011

T.J. Stark ,
T.M. Mayer  and
P.E. Russell
T.J. Stark
Affiliation:
Also at Department of Chemistry University of North Carolina, Chapel Hill, NC 27599
T.M. Mayer
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
P.E. Russell
Affiliation:
Center for Advanced Electronic Materials ProcessingNorth Carolina State University, Raleigh, NC 27695
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Abstract

A focused electron beam has been used to selectively decompose sub micron thick films of palladium acetate, Pd(OOCCH3)2, resulting in the formation of <0.1μm wide Pd rich features. Resistivity of the palladium acetate film decreased when exposed to doses above 500μC/cm2. Annealing to 160°C further reduces the resistivity of the exposed areas to as low as 100μΔcm. XPS analysis of the exposed areas indicate that the Pd is reduced to a metallic state and that the ratio of C and 0 to Pd drops to 1.5 and 0.6, respectively, after exposure. Residual gas analysis during exposure indicates that CO2 and CH3 are the primary volatile products of the decomposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 236: Symposium B – Photons and Low Energy Particles in Surface Processing , 1991 , 165
Copyright
Copyright © Materials Research Society 1992

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